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Overview of Lithographic processes

BALTFAB is orientated to alternative patterning methods using laser ablation and surface functionalization.

Technique Minimum feature size Working area Process speed Applications
Dip Pen Nanolithography (DPN) <50 nm ~50×50 mm2 Single tip 0,2-5 µm/s, highly scalable. Most of the standard lithographic applications. Direct deposition of conducting and bifunctional compounds, nanoparticles, DNA, proteins, etc. In situ chemical reactions. Multilayer assembly.
Microcontact Printing (μCP) ~100 nm <100×100 mm2 Centimeters-sized layouts can be replicated in ~ tens of seconds Most of the standard lithographic applications. Direct deposition of conducting and bifunctional compounds, nanoparticles, proteins, etc. In situ chemical reactions. Microfluidics.
Piezoelectric InkJet Printing ~30 µm; (~250 nm if combined with self-assembly) 200×200 mm2 Single nozzle <3 mm/s, ~100nL/s, scalable. Most of the standard lithographic applications. Direct deposition of conducting and bifunctional compounds, polymers, nanoparticles, DNA, proteins, etc. In situ chemical reactions. Microfluidics.
Laser Direct Writing (LDW) 3-5 µm 200×200 mm2 Up to 2 m/s with XYZ stages; 20 m/s with galvoscanners Thin-film structuring. Selective and localized modifications of surface.
Ultrashort Pulse Laser Ablation (ULA) 15 µm 100x200x200 mm2 Material dependent 1000-100000 µm3/s 3D microfabrication; micromoulds. Microfluidics.
Laser Beam Interference Ablation (LBIA) Period ~ wavelength; 100-200 nm 0.5×0.5 mm2 1000 µm2/shot 2D patterning of thin films and surfaces; surface modification.
Colloidal Nanolithography <10 nm <100×100 mm2 N/A Nanoparticle arrays, biomaterials, nanoplasmonics, etc.
Laser-Assisted Multicomponent Patterning See LDW and LBIA, respectively See LDW and LBIA, respectively See ULA and LBIA, respectively Arraying of different chemical functionalities on solid substrates. Design of bio-arrays.
Optical Microscopy- Based Photolithography ~200 nm <100×100 mm2 Slower than in µCP. Standard lithographic applications. For rapid prototyping, reference structures, etc.

Pricing

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Martynas Gavutis
customer@baltfab.lt
+370 526 616 43

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