Laser Beam Interference Ablation (LBIA) combines multiple laser beams to create a spatial interference pattern. The interference effect allows reducing feature dimensions to below the diffraction limit, Multi-beam parallel processing for periodic structures.
LBIA is used for 2D patterning of thin films and surfaces and surface modification. Min period 600 nm using 532 nm wavelength, with uniform spacing within the laser spot size of ~50um
Absorbing surface required: Chromed glass, Au, Cu, Si, Al, others